A light-trapping-structure vertical Ge photodetector (PD) is demonstrated. In the scheme, a 3 μm radius Ge mesa is fabricated to constrain the optical signal in the circular absorption area. Benefiting from the light-trapping structure, the trade-off between bandwidth and responsivity can be relaxed, and high opto-electrical bandwidth and high responsivity are achieved simultaneously. The measured 3 dB bandwidth of the proposed PD is around 67 GHz, and the responsivity is around 1.05 A/W at wavelengths between 1520 and 1560 nm. At 1580 nm, the responsivity is still over 0.78 A/W. A low dark current of 6.4 nA is also achieved at -2V bias voltage. Based on this PD, a clear eye diagram of 100 GBaud four-level pulse amplitude modulation (PAM-4) is obtained. With the aid of digital signal processing, 240 Gb/s PAM-4 signal back-to-back transmission is achieved with a bit error ratio of 1.6×10-2. After 1 km and 2 km fiber transmission, the highest bit rates are 230 and 220 Gb/s, respectively.

In recent years, optical modulators, photodetectors, (de)multiplexers, and heterogeneously integrated lasers based on silicon optical platforms have been verified. The performance of some devices even surpasses the traditional III-V and photonic integrated circuit (PIC) platforms, laying the foundation for large-scale photonic integration. Silicon photonic technology can overcome the limitations of traditional transceiver technology in high-speed transmission networks to support faster interconnection between data centers. In this article, we will review recent progress for silicon PICs. The first part gives an overview of recent achievements in silicon PICs. The second part introduces the silicon photonic building blocks, including low-loss waveguides, passive devices, modulators, photodetectors, heterogeneously integrated lasers, and so on. In the third part, the recent progress on high-capacity silicon photonic transceivers is discussed. In the fourth part, we give a review of high-capacity silicon photonic networks on chip.

An ultrafast microring modulator (MRM) is fabricated and presented with Vπ·L of 0.825V·cm. A 240 Gb/s PAM-8 signal transmission over 2 km standard single-mode fiber (SSMF) is experimentally demonstrated. PN junction doping concentration is optimized, and the overall performance of the MRM is improved. Optical peaking is introduced to further extend the EO bandwidth from 52 to 110 GHz by detuning the input wavelength. A titanium nitride heater with 0.1 nm/mW tuning efficiency is implemented above the MRM to adjust the resonant wavelength. High bit rate modulations based on the high-performance and compact MRM are carried out. By adopting off-line signal processing in the transmitter and receiver side, 120 Gb/s NRZ, 220 Gb/s PAM-4, and 240 Gb/s PAM-8 are measured with the back-to-back bit error ratio (BER) of 5.5×10-4, 1.5×10-2, and 1.4×10-2, respectively. A BER with different received optical power and 2 km SSMF transmission is also investigated. The BER for 220 Gb/s PAM-4 and 240 Gb/s PAM-8 after 2 km SSMF transmission is calculated to be 1.7×10-2 and 1.5×10-2, which meet with the threshold of soft-decision forward-error correction, respectively.

We demonstrate the optical transmission of an 800 Gbit/s (4×200Gbit/s) pulse amplitude modulation-4 (PAM-4) signal and a 480 Gbit/s (4×120Gbit/s) on–off-keying (OOK) signal by using a high-bandwidth (BW) silicon photonic (SiP) transmitter with the aid of digital signal processing (DSP). In this transmitter, a four-channel SiP modulator chip is co-packaged with a four-channel driver chip, with a measured 3 dB BW of 40 GHz. DSP is applied in both the transmitter and receiver sides for pre-/post-compensation and bit error rate (BER) calculation. Back-to-back (B2B) BERs of the PAM-4 signal and OOK signal are first measured for each channel of the transmitter with respect to a variety of data rates. Similar BER performance of four channels shows good uniformity of the transmitter between different channels. The BER penalty of the PAM-4 and OOK signals for 500 m and 1 km standard single-mode fiber (SSMF) transmission is then experimentally tested by using one channel of the transmitter. For a 200 Gbit/s PAM-4 signal, the BER is below the hard-decision forward error correction (HD-FEC) threshold for B2B and below the soft-decision FEC (SD-FEC) threshold after 1 km transmission. For a 120 Gbit/s OOK signal, the BER is below SD-FEC threshold for B2B. After 500 m and 1 km transmission, the data rate of the OOK signal shrinks to 119 Gbit/s and 118 Gbit/s with the SD-FEC threshold, respectively. Finally, the 800 Gbit/s PAM-4 signal with 1 km transmission is achieved with the BER of all four channels below the SD-FEC threshold.